Epitaxy of Semiconductors: Physics and Fabrication of Heterostructures

This textbook is essential for a comprehensive upper-level graduate course on the crystalline growth of semiconductor heterostructures. It discusses the structural and electronic properties of strained epitaxial layers, thermodynamics and kinetics of layer growth, and major growth techniques. It also examines cubic and hexagonal semiconductors, strain relaxation by misfit dislocations, strain and confinement effects on electronic states, surface structures, and processes during nucleation and growth.

Format: Paperback / softback
Length: 535 pages
Publication date: 22 July 2021
Publisher: Springer Nature Switzerland AG

The extended and revised edition of this textbook is a comprehensive resource for a rigorous upper-level graduate course on the crystalline growth of semiconductor heterostructures. Heteroepitaxy, the foundation of today's advanced electronic and optoelectronic devices, holds immense significance in materials research and nanotechnology. This book delves into the structural and electronic properties of strained epitaxial layers, exploring the thermodynamics and kinetics of layer growth. It also provides detailed descriptions of the primary growth techniques, including metalorganic vapor-phase epitaxy, molecular-beam epitaxy, and liquid-phase epitaxy. Additionally, it examines in depth cubic and hexagonal semiconductors, strain relaxation by misfit dislocations, strain and confinement effects on electronic states, surface structures, and processes during nucleation and growth. With a minimum requirement of solid-state physics knowledge, this textbook serves as an introductory guide for natural sciences, materials science, and electrical engineering students, as well as their lecturers. It is supported by extensive references and over 300 detailed illustrations, enhancing the understanding of epitaxial growth theory and practice.

In this second edition, numerous topics have been expanded and explored in greater detail. These include in situ growth monitoring, the application of surfactants, the properties of dislocations and defects in organic crystals, and specialized growth techniques such as vapor-liquid-solid growth of nanowires and selective-area epitaxy. By incorporating these enhancements, the textbook ensures that students and scholars have access to the most current and comprehensive information in the field of semiconductor heterostructures.

Weight: 836g
Dimension: 155 x 233 x 35 (mm)
ISBN-13: 9783030438715
Edition number: 2nd ed. 2020