Harry J. Levinson
Extreme Ultraviolet Lithography
Extreme Ultraviolet Lithography
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- Condition: Brand new
- UK Delivery times: Usually arrives within 2 - 3 working days
- UK Shipping: Fee starts at £2.39. Subject to product weight & dimension
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- More about Extreme Ultraviolet Lithography
Format: Paperback / softback
Length: 344 pages
Publication date: 28 February 2026
Publisher: SPIE Press
Discover refined techniques in EUV lithography with updates detailing exposure tools, light sources, masks, resists, metrology, and computational lithography. Addressing cost and process control, the work offers practical insights from a seasoned lithographer operating in manufacturing and development.
ISBN-13: 9781510692534
Edition number: Second Edition
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UK and International shipping information
UK and International shipping information
UK Delivery and returns information:
- Delivery within 2 - 3 days when ordering in the UK.
- Shipping fee for UK customers from £2.39. Fully tracked shipping service available.
- Returns policy: Return within 30 days of receipt for full refund.
International deliveries:
Shulph Ink now ships to Australia, Belgium, Canada, France, Germany, Ireland, Italy, India, Luxembourg Saudi Arabia, Singapore, Spain, Netherlands, New Zealand, United Arab Emirates, United States of America.
- Delivery times: within 5 - 10 days for international orders.
- Shipping fee: charges vary for overseas orders. Only tracked services are available for most international orders. Some countries have untracked shipping options.
- Customs charges: If ordering to addresses outside the United Kingdom, you may or may not incur additional customs and duties fees during local delivery.
