Fundamentals of Microelectromechanical Systems (MEMS)

This engineering guide provides a comprehensive overview of MEMS technology, including its fabrication, engineering, and applications. It covers topics such as basic microfabrication, micromachining, transduction principles, RF and optical MEMS, mechanics and inertial sensors, thin film properties, pressure sensors, microphones, piezoelectric films, material properties, microfluidic systems, and BioMEMS. It also explores the future of MEMS in the workforce and discusses MEMS research and development.

\n Format: Hardback
\n Length: 416 pages
\n Publication date: 02 June 2021
\n Publisher: McGraw-Hill Education
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This extensive engineering guide provides a comprehensive walkthrough of incorporating cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) capabilities in your designs. Authored by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) offers a clear and detailed explanation of the latest technologies and methodologies. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Additionally, readers will gain insights into the future of MEMS in the workforce and explore MEMS research and development.

The coverage encompasses a wide range of topics, including:

Basic microfabrication: This section delves into the processes involved in creating MEMS structures, such as etching, deposition, and lithography.

Micromachining: Micromachining techniques are employed to shape and manipulate MEMS components, enabling the development of precise and complex devices.

Transduction principles: This section explores the principles of transduction, which are essential for converting physical phenomena into electrical signals in MEMS sensors.

RF and optical MEMS: RF and optical MEMS technologies are utilized for communication and sensing applications, such as wireless communication and optical imaging.

Mechanics and inertial sensors: MEMS sensors are designed to measure various mechanical and inertial parameters, including acceleration, pressure, and orientation.

Thin film properties and SAW/BAW sensors: This section discusses the properties of thin films and their application in the development of SAW/BAW sensors, which are used for sensing and measurement.

Pressure sensors and microphones: MEMS pressure sensors and microphones are used in a wide range of applications, including medical devices, consumer electronics, and automotive systems.

Piezoelectric films: Piezoelectric films are utilized in MEMS devices for generating electrical power and sensing mechanical forces.

Material properties expressed as tensor: This section introduces the concept of material properties expressed as tensor, which is crucial in understanding the behavior of MEMS materials.

Microfluidic systems and BioMEMS: Microfluidic systems and BioMEMS are used for the manipulation and analysis of small volumes of fluids, enabling applications in biomedicine and biotechnology.

Power MEMS: Power MEMS technologies are employed for the generation and conversion of electrical power, enabling the development of energy-efficient devices.

Electronic noises, interface circuits, and oscillators: This section explores the electronic noise and interface circuits in MEMS devices, as well as the design and analysis of oscillators.

By providing a comprehensive and up-to-date overview of MEMS engineering, fabrication, and applications, Fundamentals of Microelectromechanical Systems (MEMS) serves as a valuable resource for engineers, researchers, and students interested in this field.

\n Weight: 900g\n
Dimension: 194 x 244 x 30 (mm)\n
ISBN-13: 9781264257584\n \n