Micromachined Circuits and Devices: Microwave to Sub-millimeter Applications

This book discusses the design of switching and resonant devices using radio frequency (RF) micromachining (MEMS) technology, covering various topologies and transduction mechanisms. It provides design guidelines for MEMS-based digital phase shifters, tunable filters, and antennas. It also emphasizes the reliability of MEMS switches and digital phase shifters and discusses the performance analysis of metamaterial-inspired MEMS switches for millimeter wave applications. The book concludes with future research activities and potential applications in space, defense, sensors, and biomedical fields.

Format: Paperback / softback
Length: 380 pages
Publication date: 09 February 2023
Publisher: Springer Verlag, Singapore

This comprehensive book delves into the cutting-edge design of various switching and resonant devices utilizing state-of-the-art radio frequency (RF) micromachining (MEMS) technology. It explores a wide range of MEMS switch topologies, considering optimal performances across the microwave to millimeter wave frequency range. The book discusses various micromachined switching networks, ranging from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T), utilizing vertical and lateral actuation movements of the switch. It highlights different transduction mechanisms of micromachined resonators, including capacitive, piezoelectric, and piezoresistive types.

The book serves as a valuable resource for developing MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Additionally, it provides comprehensive guidelines for improving the reliability of micromachined switches and digital phase shifters when multiple switches are operating simultaneously. It emphasizes the iterative process and extensive characterization required to achieve reliable MEMS digital phase shifters.

Furthermore, the book delves into detailed performance analysis of metamaterial-inspired MEMS switches for applications in millimeter wave frequency bands up to approximately 170 GHz. It concludes with a discussion of future research activities in RF MEMS technology and its potential applications in space, defense, sensors, and biomedical fields.

Overall, this book offers a comprehensive and in-depth exploration of RF MEMS technology, providing valuable insights for researchers, engineers, and practitioners in the field.

Weight: 605g
Dimension: 235 x 155 (mm)
ISBN-13: 9789811694455
Edition number: 1st ed. 2022