Silicon Sensors and Actuators: The Feynman Roadmap

This book provides a comprehensive review of silicon micromechanical transducers and addresses emerging and future technology challenges. It proposes a "Feynman Roadmap" for silicon sensors and shares the authors' industrially proven track record of development, design, and manufacturing. It is a valuable resource for students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development.

Format: Hardback
Length: 997 pages
Publication date: 13 April 2022
Publisher: Springer Nature Switzerland AG

This comprehensive book delves into the current state-of-the-art knowledge of silicon micromechanical transducers, while also exploring emerging and future technological challenges. It provides readers with a solid theoretical and practical foundation that enables them to analyze the critical performance aspects of devices, evaluate fabrication processes, and conceive and design innovative solutions for future applications. Drawing inspiration from Richard Feynman's visionary talk, "There is Plenty of Room at the Bottom," the authors propose a transformative perspective, viewing silicon sensors as integral components of a "Feynman Roadmap" rather than solely focusing on the traditional "More-than-Moore" technology roadmap. By sharing their extensive industrial experience in development, design, and manufacturing, along with their visionary approach to the technology, the authors empower readers to gain a deep understanding of the core topics in a highly effective manner. This book is a valuable resource for students, researchers, engineers, and technologists engaged in silicon-based sensor and actuator research and development, offering a wealth of valuable and groundbreaking information.

Weight: 1628g
Dimension: 162 x 244 x 64 (mm)
ISBN-13: 9783030801342
Edition number: 1st ed. 2022