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Advanced MEMS/NEMS Fabrication and Sensors
Advanced MEMS/NEMS Fabrication and Sensors
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- More about Advanced MEMS/NEMS Fabrication and Sensors
Format: Paperback / softback
Length: 312 pages
Publication date: 13 October 2022
Publisher: Springer Nature Switzerland AG
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.
Dimension: 235 x 155 (mm)
ISBN-13: 9783030797515
Edition number: 2022 ed.
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