Kaiying Wang
Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
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- More about Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
Format: Hardback
Length: 122 pages
Publication date: 18 December 2025
Publisher: Taylor & Francis Ltd
Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS).
Weight: 410g
Dimension: 234 x 156 (mm)
ISBN-13: 9781041144960
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