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Ion Implantation and Annealing Applications, Science and Technology: Contributions from IIT School, Edition 2024
Ion Implantation and Annealing Applications, Science and Technology: Contributions from IIT School, Edition 2024
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- More about Ion Implantation and Annealing Applications, Science and Technology: Contributions from IIT School, Edition 2024
Format: Hardback
Length: 628 pages
Publication date: 30 May 2026
Publisher: Springer Nature Switzerland AG
It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology.
Dimension: 235 x 155 (mm)
ISBN-13: 9783032100078
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