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Microlithography: Science and Technology
Microlithography: Science and Technology
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- More about Microlithography: Science and Technology
Format: Paperback / softback
Length: 850 pages
Publication date: 24 June 2024
Publisher: Taylor & Francis Ltd
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
Weight: 1660g
Dimension: 254 x 178 (mm)
ISBN-13: 9781032836737
Edition number: 3 ed
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