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Photon Sources for Lithography and Metrology
Photon Sources for Lithography and Metrology
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- More about Photon Sources for Lithography and Metrology
Format: Hardback
Length: 1320 pages
Publication date: 31 October 2023
Publisher: SPIE Press
Photon sources enable the extension of lithography and metrology technologies forcontinued scaling of circuit elements and therefore are the key drivers for the extension of Moore's law. This volume is the authoritative reference on photon source technology and includes contributions from leading researchers and suppliers in the field.
Weight: 1027g
ISBN-13: 9781510653719
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