Chunhui Chung
Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
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- Condition: Brand new
- UK Delivery times: Usually arrives within 2 - 3 working days
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Excellent- More about Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
Format: Hardback
Length: 304 pages
Publication date: 29 January 2021
Publisher: John Wiley & Sons Inc
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.
Weight: 686g
Dimension: 251 x 175 x 26 (mm)
ISBN-13: 9780470061213
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